Wafer Sorter: It is mainly used for the transfer of wafers between carriers.
|
Equipment Size |
1300x1300x2000mm |
Placement Accuracy |
±0.1mm |
|
Applicable Wafer Size |
100-300mm |
Warpage |
＜2mm |
|
Applicable Wafer Thickness |
＞150um |
Power Supply |
AC 220V, 10A |
|
Aligner Initial Offset |
＜6mm |
Source Gas |
CDA |
Product Feature And Application
- A variety of loading and unloading methods can be selected.
- Suitable for a variety of wafers
- Can be used for transfer between various vehicles
- Can be used on TAIKO wafers and normal wafers
- Option
- End-effector: Vacuum suction, Edge gripper, Bernoulli
- Flip moudle
- Aliger center, Aliger notch, OCR
- AOI
- Auto Barcode Scan & Program Loading
- SECS/GEM
Production Details
Our Factory And Workshop
Certificate
Cooperative Partner
FAQ
Q: What is a wafer sorter machine?
A: A chip sorter is a device that transfers a wafer from one device to another and performs visual detection.
Q: Which fixtures are suitable for the transfer of this equipment between them?
A: Suitable for transfer between FOUP, FOSB, and Cassette.
Q: How to choose the right wafer sorter?
A: Choose according to different wafer sizes and treatment types.
Choose according to the different functional requirements.
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